JPH0438032U - - Google Patents

Info

Publication number
JPH0438032U
JPH0438032U JP7932090U JP7932090U JPH0438032U JP H0438032 U JPH0438032 U JP H0438032U JP 7932090 U JP7932090 U JP 7932090U JP 7932090 U JP7932090 U JP 7932090U JP H0438032 U JPH0438032 U JP H0438032U
Authority
JP
Japan
Prior art keywords
reticle
conveyance device
support member
linear motion
automatic conveyance
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP7932090U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP7932090U priority Critical patent/JPH0438032U/ja
Publication of JPH0438032U publication Critical patent/JPH0438032U/ja
Pending legal-status Critical Current

Links

JP7932090U 1990-07-27 1990-07-27 Pending JPH0438032U (en])

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP7932090U JPH0438032U (en]) 1990-07-27 1990-07-27

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP7932090U JPH0438032U (en]) 1990-07-27 1990-07-27

Publications (1)

Publication Number Publication Date
JPH0438032U true JPH0438032U (en]) 1992-03-31

Family

ID=31623372

Family Applications (1)

Application Number Title Priority Date Filing Date
JP7932090U Pending JPH0438032U (en]) 1990-07-27 1990-07-27

Country Status (1)

Country Link
JP (1) JPH0438032U (en])

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